Inventor
OSHIMA YUKIO
JP3 patents
Patents
3 patentsUS7931755B2Apr 26, 2011
Method for removing deposit from substrate and method for drying substrate, as well as apparatus for removing deposit from substrate and apparatus for drying substrate using these methods
MITSUBOSHI DIAMOND IND CO LTD13 citations81
US7770500B2Aug 10, 2010
Substrate dividing system, substrate manufacturing equipment, substrate scribing method and substrate dividing method
MITSUBOSHI DIAMOND IND CO LTD9 citations79
US7426883B2Sep 23, 2008
Substrate-cutting system, substrate-producing apparatus, substrate-scribing method, and substrate-cutting method
MITSUBOSHI DIAMOND IND CO LTD17 citations79