Inventor

KLEINSCHMIDT JUERGEN

DE83 patents

⚠️ This page may combine multiple inventors who share the name “KLEINSCHMIDT JUERGEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLEINSCHMIDT JUERGEN

LAMBDA PHYSIK AG

Reduction of laser speckle in photolithography by controlled disruption of spatial coherence of laser beam

F2-laser with line selection

Gas performance control system for gas discharge lasers

Multiple-pass interferometric device

Method and apparatus for wavelength calibration

Narrow band excimer or molecular fluorine laser having an output coupling interferometer

Narrow band excimer or molecular fluorine laser with adjustable bandwidth

Method and apparatus for wavelength calibration

Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines

E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems

Resonator arrangement for bandwidth control

Method and apparatus for reduction of spectral fluctuations

Narrow band excimer laser with a prism-grating as line-narrowing optical element

Wavelength and bandwidth monitor for excimer or molecular fluorine laser

Narrow band excimer laser with a resonator containing an optical element for making wavefront corrections

Molecular fluorine laser

Temperature compensation method for wavemeters

Narrow band excimer or molecular fluorine laser with improved beam parameters

Molecular fluorine laser

Narrow band excimer or molecular fluorine laser having an output coupling interferometer

Narrow band excimer or molecular fluorine laser having an output coupling interferometer

Narrow band excimer or molecular fluorine laser with adjustable bandwidth

Laser gas replenishment method

F2-laser with line selection

Internal wavelength calibration for tunable ArF-excimer laser using atomic carbon and molecular oxygen absorption lines

XTREME TECH GMBH

Arrangement for generating extreme ultraviolet (EUV) radiation based on a gas discharge

Arrangement for the generation of EUV radiation with high repetition rates

Arrangement for monitoring the energy radiated by an EUV radiation source

Method and arrangement for the suppression of debris in the generation of short-wavelength radiation based on a plasma

Arrangement and method for the generation of extreme ultraviolet radiation

Device and method for generating extreme ultraviolet (EUV) radiation

EUV radiation source with high radiation output based on a gas discharge

Method for the stabilization of the radiation output of a gas discharge-coupled radiation source in pulsed operation

Arrangement for the generation of intensive short-wavelength radiation based on a gas discharge plasma

LAMBDA PHYSIK GMBH

Wavelength calibration tool for narrow band excimer lasers

Method and apparatus for wavelength calibration

Laser for generating narrow-band radiation

BENTELER WERKE AG

Arrangement for connecting a metal pipe to a receiving sleeve

Method and device for forming a hollow metallic workpiece by inner pressure

BENTELER AUTOMOBILTECHNIK GMBH

Exhaust system for a motor vehicle

Exhaust pipe, and method of making an exhaust pipe

(unassigned)

Gas performance control system for gas discharge lasers

HAKEMEYER FRANK

Electrical terminal module

MUELLER OLIVER

Modified AAV capsid polypeptides

SONNTAG FLORIAN

Assembly activating protein (AAP) and its use for the manufacture of parvovirus particles essentially consisting of VP3

XTREME TECHNOLOGIES GBMH

Radiation source with high average EUV radiation output

PHOENIX CONTACT GMBH & CO

Adjusting device for the setpoint of an electric module

TRANSGENE SA

AAV DNA comprising helper virus sequences

XTREME TECHONOLGIES GMBH

Arrangement for the generation of short-wavelength radiation based on a gas discharge plasma and method for the production of coolant-carrying electrode housings

BENTLER AG

Apparatus for hydraulically shaping hollow bodies of metal