Inventor
HORSKY THOMAS NEIL
US9 patents
⚠️ This page may combine multiple inventors who share the name “HORSKY THOMAS NEIL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMEQUIP INC
8 patentsUS7022999B2Apr 4, 2006
Ion implantation ion source, system and method
SEMEQUIP INC66 citations97
US7185602B2Mar 6, 2007
Ion implantation ion source, system and method
SEMEQUIP INC54 citations94
US7112804B2Sep 26, 2006
Ion implantation ion source, system and method
SEMEQUIP INC37 citations94
US7107929B2Sep 19, 2006
Ion implantation ion source, system and method
SEMEQUIP INC61 citations94
US7800312B2Sep 21, 2010
Dual mode ion source for ion implantation
SEMEQUIP INC14 citations91
US7479643B2Jan 20, 2009
Ion implantation ion source, system and method
SEMEQUIP INC9 citations91
US7732787B2Jun 8, 2010
Ion implantation ion source, system and method
SEMEQUIP INC5 citations72
US7994031B2Aug 9, 2011
Method of manufacturing CMOS devices by the implantation of N- and P-type cluster ions
SEMEQUIP INC1 citations48