P

Inventor

TANGE YUJI

JP5 patents
⚠️ This page may combine multiple inventors who share the name “TANGE YUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI LTD

4 patents
US6127683AOct 3, 2000

Electron beam drawing apparatus

HITACHI LTD7 citations71
US6337486B2Jan 8, 2002

Electron beam drawing process and electron beam drawing apparatus

HITACHI LTD2 citations60
US6246064B1Jun 12, 2001

Electron beam drawing apparatus

HITACHI LTD4 citations60
US5972772AOct 26, 1999

Electron beam drawing process

HITACHI LTD4 citations60

SHINDO TAMOTSU

1 patent
US8258472B2Sep 4, 2012

Charged particle radiation device and image capturing condition determining method using charged particle radiation device

SHINDO TAMOTSU4 citations47