Inventor
LAVERDIERE MARC
US24 patents
⚠️ This page may combine multiple inventors who share the name “LAVERDIERE MARC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
16 patentsUS7740024B2Jun 22, 2010
System and method for flow monitoring and control
ENTEGRIS INC70 citations97
US7543596B2Jun 9, 2009
Liquid flow controller and precision dispense apparatus and system
ENTEGRIS INC36 citations95
US7610117B2Oct 27, 2009
System and method for flow monitoring and control
ENTEGRIS INC20 citations92
US7407594B2Aug 5, 2008
Liquid filtration device
ENTEGRIS INC18 citations92
US7163237B2Jan 16, 2007
Separation module
ENTEGRIS INC27 citations92
US7107128B2Sep 12, 2006
System for controlling fluid flow
ENTEGRIS INC18 citations92
US7726876B2Jun 1, 2010
System and method for non-intrusive thermal monitor
ENTEGRIS INC35 citations89
US8015995B2Sep 13, 2011
System and method for flow monitoring and control
ENTEGRIS INC7 citations84
US7469932B2Dec 30, 2008
Receptor for a separation module
ENTEGRIS INC12 citations84
US7317971B2Jan 8, 2008
System for controlling fluid flow based on a valve break point
ENTEGRIS INC13 citations84
US9468872B2Oct 18, 2016
Purification system with manifold assembly and removable filter cassette
ENTEGRIS INC4 citations68
US7443483B2Oct 28, 2008
Systems and methods for fluid flow control in an immersion lithography system
ENTEGRIS INC5 citations63
US8939428B2Jan 27, 2015
Liquid flow controller and precision dispense apparatus and system
ENTEGRIS INC3 citations62
US7572367B2Aug 11, 2009
Liquid filtration device
ENTEGRIS INC2 citations62
US9617988B2Apr 11, 2017
System and method for variable dispense position
ENTEGRIS INC0 citations51
US9943789B2Apr 17, 2018
Modular filter cassette
ENTEGRIS INC1 citations44
LAVERDIERE MARC
5 patentsUS8082946B2Dec 27, 2011
Liquid flow controller and precision dispense apparatus and system
LAVERDIERE MARC565 citations98
US8292598B2Oct 23, 2012
System and method for a variable home position dispense system
LAVERDIERE MARC30 citations91
US8814536B2Aug 26, 2014
System and method for a variable home position dispense system
LAVERDIERE MARC8 citations83
US8430120B2Apr 30, 2013
Liquid flow controller and precision dispense apparatus and system
LAVERDIERE MARC7 citations83
US8082066B2Dec 20, 2011
System for controlling valve fluid flow based on rate of change of close rate acceleration
LAVERDIERE MARC7 citations83