Inventor

KAPPELHOF PIETER

NL3 patents

⚠️ This page may combine multiple inventors who share the name “KAPPELHOF PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KAPPELHOF PIETER

2 patents

US8710461B2Apr 29, 2014

Assembly for providing an aligned stack of two or more modules and a lithography system or a microscopy system comprising such an assembly

KAPPELHOF PIETER0 citations35

US9146480B2Sep 29, 2015

Support structure for wafer table

KAPPELHOF PIETER0 citations24

VAN DEN BROM ALRIK

1 patent

US9362084B2Jun 7, 2016

Electro-optical element for multiple beam alignment

VAN DEN BROM ALRIK1 citations39