Inventor
NAKAO HIDETAKA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “NAKAO HIDETAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
6 patentsUS5885134AMar 23, 1999
Polishing apparatus
EBARA CORP81 citations95
US6074276AJun 13, 2000
Polishing apparatus
EBARA CORP22 citations91
US9555517B2Jan 31, 2017
Film thickness signal processing apparatus, polishing apparatus, film thickness signal processing method, and polishing method
EBARA CORP4 citations73
US9144881B2Sep 29, 2015
Polishing apparatus and polishing method
EBARA CORP5 citations72
US10688622B2Jun 23, 2020
Substrate processing apparatus
EBARA CORP2 citations71
USRE38215EAug 12, 2003
Polishing apparatus
EBARA CORP4 citations61