Inventor
SCHATTENBURG MARK L
US6 patents
⚠️ This page may combine multiple inventors who share the name “SCHATTENBURG MARK L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
MASSACHUSETTS INST TECHNOLOGY
4 patentsUS4890309ADec 26, 1989
Lithography mask with a π-phase shifting attenuator
MASSACHUSETTS INST TECHNOLOGY133 citations96
US5142385AAug 25, 1992
Holographic lithography
MASSACHUSETTS INST TECHNOLOGY101 citations94
US5136169AAug 4, 1992
Energy beam locating
MASSACHUSETTS INST TECHNOLOGY41 citations91
US8025832B2Sep 27, 2011
Method for shaping sheet thermoplastic and the like
MASSACHUSETTS INST TECHNOLOGY4 citations56