Inventor

BUCCOS PAUL S

US3 patents

⚠️ This page may combine multiple inventors who share the name “BUCCOS PAUL S”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VARIAN SEMICONDUCTOR EQUIPMENT

2 patents

US6909102B1Jun 21, 2005

Ion implanter system, method and program product including particle detection

VARIAN SEMICONDUCTOR EQUIPMENT27 citations85

US7544254B2Jun 9, 2009

System and method for cleaning an ion implanter

VARIAN SEMICONDUCTOR EQUIPMENT2 citations55

NUNAN PETER

1 patent

US8461552B2Jun 11, 2013

Active particle trapping for process control

NUNAN PETER0 citations27