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Inventor
YASHIMA TSUKASA
JP
2 patents
⚠️ This page may combine multiple inventors who share the name “YASHIMA TSUKASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KOKUSAI ELECTRIC CORP
1 patent
US10998210B2
May 4, 2021
Substrate processing apparatus
KOKUSAI ELECTRIC CORP
1 citations
56
NOGAMI SHIGEKI
1 patent
US8806370B2
Aug 12, 2014
Substrate processing apparatus
NOGAMI SHIGEKI
1 citations
31