Inventor

VISHAL VAIBHAW

US5 patents

⚠️ This page may combine multiple inventors who share the name “VISHAL VAIBHAW”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VISHAL VAIBHAW

2 patents

US8681493B2Mar 25, 2014

Heat shield module for substrate-like metrology device

VISHAL VAIBHAW2 citations56

US9514970B2Dec 6, 2016

Methods of attaching a module on wafer substrate

VISHAL VAIBHAW1 citations42

KLA TENCOR CORP

2 patents

US11150140B2Oct 19, 2021

Instrumented substrate apparatus for acquiring measurement parameters in high temperature process applications

KLA TENCOR CORP0 citations49

US10083852B1Sep 25, 2018

Floating wafer chuck

KLA TENCOR CORP1 citations48

SUN MEI

1 patent

US9134186B2Sep 15, 2015

Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpieces

SUN MEI2 citations58