Inventor
NISHIHATA TAKAHIRO
JP5 patents
Patents
5 patentsUS11545336B2Jan 3, 2023
Scanning electron microscopy system and pattern depth measurement method
HITACHI HIGH TECH CORP2 citations70
US11302513B2Apr 12, 2022
Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus
HITACHI HIGH TECH CORP1 citations59
US12243711B2Mar 4, 2025
Method, apparatus, and program for determining condition related to captured image of charged particle beam apparatus
HITACHI HIGH TECH CORP0 citations50
US12142457B2Nov 12, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US11355304B2Jun 7, 2022
Electronic microscope device
HITACHI HIGH TECH CORP0 citations49