Inventor
OSAKI MAYUKA
JP10 patents
⚠️ This page may combine multiple inventors who share the name “OSAKI MAYUKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
9 patentsUS10186399B2Jan 22, 2019
Scanning electron microscope
HITACHI HIGH TECH CORP4 citations72
US11545336B2Jan 3, 2023
Scanning electron microscopy system and pattern depth measurement method
HITACHI HIGH TECH CORP2 citations70
US11211226B2Dec 28, 2021
Pattern cross-sectional shape estimation system and program
HITACHI HIGH TECH CORP1 citations62
US9488815B2Nov 8, 2016
Pattern evaluation method and pattern evaluation device
HITACHI HIGH TECH CORP2 citations60
US11302513B2Apr 12, 2022
Electron microscope apparatus, inspection system using electron microscope apparatus, and inspection method using electron microscope apparatus
HITACHI HIGH TECH CORP1 citations59
US11164720B2Nov 2, 2021
Scanning electron microscope and calculation method for three-dimensional structure depth
HITACHI HIGH TECH CORP0 citations51
US12500061B2Dec 16, 2025
Observation system, observation method, and program
HITACHI HIGH TECH CORP0 citations50
US12142457B2Nov 12, 2024
Charged particle beam device
HITACHI HIGH TECH CORP0 citations50
US11355304B2Jun 7, 2022
Electronic microscope device
HITACHI HIGH TECH CORP0 citations49