Inventor
TSUNO MASAYA
JP7 patents
Patents
7 patentsUS11733162B2Aug 22, 2023
Ultraviolet detection material and ultraviolet detection device
SHINKO ELECTRIC IND CO2 citations70
US12077701B2Sep 3, 2024
Ultraviolet detection device comprising a ceramic substrate and composite oxides
SHINKO ELECTRIC IND CO0 citations60
US11721574B2Aug 8, 2023
Member for electrostatic chuck and electrostatic chuck
SHINKO ELECTRIC IND CO1 citations60
US11437263B2Sep 6, 2022
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations60
US11811009B2Nov 7, 2023
Light emitting device with wiring enclosed by ceramic substrate
SHINKO ELECTRIC IND CO0 citations50
US11978831B2May 7, 2024
Light emitting device
SHINKO ELECTRIC IND CO0 citations49
US10861732B2Dec 8, 2020
Electrostatic chuck and substrate fixing device
SHINKO ELECTRIC IND CO0 citations49