Inventor
LIN EN-TIAN
TW11 patents
Patents
11 patentsUS12343684B2Jul 1, 2025
Filter apparatus for semiconductor device fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US11826709B2Nov 28, 2023
Filter apparatus for semiconductor device fabrication process
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations61
US12105003B2Oct 1, 2024
System and method for testing a filter
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US12020962B2Jun 25, 2024
Measuring system and method of measuring static charges
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations60
US11668639B2Jun 6, 2023
Method for processing a substrate by using fluid flowing through a particle detector
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US10976233B2Apr 13, 2021
Particle detector
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations55
US12487215B2Dec 2, 2025
Method and apparatus for determining concentration of compound in ultrapure water
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US12459841B2Nov 4, 2025
Method of processing liquid containing ammonia nitrogen from semiconductor fabrication machine
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations54
US12296303B2May 13, 2025
Filter membrane and method for making the same
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12221371B2Feb 11, 2025
Systems and methods for producing ultrapure water for semiconductor fabrication processes
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50
US12510454B2Dec 30, 2025
System for filter analysis and regeneration
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47