Inventor
SHULL MARC
US3 patents
Patents
3 patentsUS12091749B2Sep 17, 2024
Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
APPLIED MATERIALS INC1 citations60
US11111582B2Sep 7, 2021
Porous showerhead for a processing chamber
APPLIED MATERIALS INC0 citations58
US12084763B2Sep 10, 2024
Microstructure control of conducting materials through surface coating of powders
APPLIED MATERIALS INC0 citations46