Inventor

TEDESCHI LEONARD MICHAEL

US3 patents

Patents

3 patents

US12265377B2Apr 1, 2025

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations71

US11709477B2Jul 25, 2023

Autonomous substrate processing system

APPLIED MATERIALS INC3 citations69

US12237158B2Feb 25, 2025

Etch feedback for control of upstream process

APPLIED MATERIALS INC0 citations48