Inventor
LIM DO-YOUN
KR8 patents
Patents
8 patentsUS10529594B2Jan 7, 2020
Apparatus and method for treating substrate
SEMES CO LTD2 citations66
US11495467B2Nov 8, 2022
Method and apparatus for etching thin layer
SEMES CO LTD1 citations59
US12427446B2Sep 30, 2025
Liquid supplying unit and liquid supplying method
SEMES CO LTD0 citations57
US12390842B2Aug 19, 2025
Supporting structure, apparatus for supporting substrate and facility for processing substrate
SEMES CO LTD0 citations57
US12322614B2Jun 3, 2025
Wafer expander for uniformly expanding gap between dies, and die supplying module and die bonding equipment including same
SEMES CO LTD0 citations57
US12540042B2Feb 3, 2026
Transfer apparatus
SEMES CO LTD0 citations47
US12227373B2Feb 18, 2025
Article transport vehicle, rail assembly, and article transport system including the same
SEMES CO LTD0 citations45
US12334381B2Jun 17, 2025
Guide unit, transfer assembly and die bonding apparatus including the same
SEMES CO LTD0 citations38