Inventor
BAKKER LEVINUS PIETER
NL77 patents
⚠️ This page may combine multiple inventors who share the name “BAKKER LEVINUS PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
37 patentsUS7352434B2Apr 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV178 citations98
US6838684B2Jan 4, 2005
Lithographic projection apparatus and particle barrier for use therein
ASML NETHERLANDS BV111 citations98
US7057190B2Jun 6, 2006
Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV51 citations96
US7136141B2Nov 14, 2006
Lithographic apparatus with debris suppression, and device manufacturing method
ASML NETHERLANDS BV25 citations93
US7247866B2Jul 24, 2007
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV16 citations92
US7145132B2Dec 5, 2006
Lithographic apparatus, illumination system and debris trapping system
ASML NETHERLANDS BV30 citations92
US7106832B2Sep 12, 2006
Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source
ASML NETHERLANDS BV33 citations92
US7088424B2Aug 8, 2006
Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method
ASML NETHERLANDS BV18 citations92
US7034308B2Apr 25, 2006
Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV37 citations92
US6859259B2Feb 22, 2005
Lithographic projection apparatus and reflector assembly for use therein
ASML NETHERLANDS BV29 citations92
US6678037B2Jan 13, 2004
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV32 citations92
US7307263B2Dec 11, 2007
Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap
ASML NETHERLANDS BV50 citations91
US7251012B2Jul 31, 2007
Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris
ASML NETHERLANDS BV25 citations91
US7315346B2Jan 1, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV27 citations90
US7456932B2Nov 25, 2008
Filter window, lithographic projection apparatus, filter window manufacturing method, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV9 citations84
US7336416B2Feb 26, 2008
Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
ASML NETHERLANDS BV12 citations84
US7061574B2Jun 13, 2006
Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV11 citations84
US6906788B2Jun 14, 2005
Lithographic projection apparatus with multiple suppression meshes
ASML NETHERLANDS BV12 citations84
US7868304B2Jan 11, 2011
Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV17 citations83
US7485881B2Feb 3, 2009
Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system
ASML NETHERLANDS BV5 citations74
US7463413B2Dec 9, 2008
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7405804B2Jul 29, 2008
Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby
ASML NETHERLANDS BV7 citations74
US7211810B2May 1, 2007
Method for the protection of an optical element, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7196343B2Mar 27, 2007
Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV9 citations74
US7193229B2Mar 20, 2007
Lithographic apparatus, illumination system and method for mitigating debris particles
ASML NETHERLANDS BV8 citations74
US7034923B2Apr 25, 2006
Optical element, lithographic apparatus comprising such optical element and device manufacturing method
ASML NETHERLANDS BV8 citations74
US7737425B2Jun 15, 2010
Contamination barrier with expandable lamellas
ASML NETHERLANDS BV5 citations73
US7706057B2Apr 27, 2010
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
ASML NETHERLANDS BV5 citations73
US6930760B2Aug 16, 2005
Lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV10 citations73
US7897110B2Mar 1, 2011
System and method for detecting at least one contamination species in a lithographic apparatus
ASML NETHERLANDS BV5 citations72
US7592610B2Sep 22, 2009
Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations63
US7414251B2Aug 19, 2008
Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system
ASML NETHERLANDS BV2 citations63
US7382436B2Jun 3, 2008
Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV5 citations63
US7256407B2Aug 14, 2007
Lithographic projection apparatus and reflector assembly for use therein
ASML NETHERLANDS BV2 citations63
US7233009B2Jun 19, 2007
Lithographic projection apparatus and reflector assembly for use therein
ASML NETHERLANDS BV4 citations63
US7105837B2Sep 12, 2006
Lithographic apparatus, device manufacturing method and radiation system
ASML NETHERLANDS BV4 citations63
US6791665B2Sep 14, 2004
Lithographic projection apparatus and device manufacturing method
ASML NETHERLANDS BV6 citations63
BAKKER LEVINUS PIETER
4 patentsUS9980698B2May 29, 2018
Re-calibration of pre-recorded images during interventions using a needle device
BAKKER LEVINUS PIETER35 citations90
US8129702B2Mar 6, 2012
Radiation system with contamination barrier
BAKKER LEVINUS PIETER10 citations83
US9097993B2Aug 4, 2015
Optical element and lithographic apparatus
BAKKER LEVINUS PIETER2 citations62
US8318288B2Nov 27, 2012
Optical element, lithographic apparatus including such optical element and device manufacturing method, and device manufactured thereby
BAKKER LEVINUS PIETER3 citations62
KONINKL PHILIPS ELECTRONICS NV
3 patentsUS7671973B2Mar 2, 2010
Optical analysis system using multivariate optical elements
KONINKL PHILIPS ELECTRONICS NV54 citations98
US8355131B2Jan 15, 2013
Device and method for acquiring image data from a turbid medium
KONINKL PHILIPS ELECTRONICS NV19 citations92
US7646869B2Jan 12, 2010
System for copy protection of an information carrier
KONINKL PHILIPS ELECTRONICS NV4 citations63
KONINK PHILIIPS ELECTRONICS N
1 patentZEISS CARL SMT AG
1 patentVAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS
1 patentKOEHLER THOMAS
1 patentSHE JUN
1 patentJONKERS JEROEN
1 patentShowing the top 50 of 77 patents by PatentIndex Score.