P

Inventor

BAKKER LEVINUS PIETER

NL77 patents
⚠️ This page may combine multiple inventors who share the name “BAKKER LEVINUS PIETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ASML NETHERLANDS BV

37 patents
US7352434B2Apr 1, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV178 citations98
US6838684B2Jan 4, 2005

Lithographic projection apparatus and particle barrier for use therein

ASML NETHERLANDS BV111 citations98
US7057190B2Jun 6, 2006

Lithographic projection apparatus, particle barrier for use therein, integrated structure manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV51 citations96
US7136141B2Nov 14, 2006

Lithographic apparatus with debris suppression, and device manufacturing method

ASML NETHERLANDS BV25 citations93
US7247866B2Jul 24, 2007

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV16 citations92
US7145132B2Dec 5, 2006

Lithographic apparatus, illumination system and debris trapping system

ASML NETHERLANDS BV30 citations92
US7106832B2Sep 12, 2006

Apparatus including a radiation source, a filter system for filtering particles out of radiation emitted by the source, and a processing system for processing the radiation, a lithographic apparatus including such an apparatus, and a method of filtering particles out of radiation emitting and propagating from a radiation source

ASML NETHERLANDS BV33 citations92
US7088424B2Aug 8, 2006

Lithographic projection apparatus, reflector assembly for use therein, and device manufacturing method

ASML NETHERLANDS BV18 citations92
US7034308B2Apr 25, 2006

Radiation system, contamination barrier, lithographic apparatus, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV37 citations92
US6859259B2Feb 22, 2005

Lithographic projection apparatus and reflector assembly for use therein

ASML NETHERLANDS BV29 citations92
US6678037B2Jan 13, 2004

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV32 citations92
US7307263B2Dec 11, 2007

Lithographic apparatus, radiation system, contaminant trap, device manufacturing method, and method for trapping contaminants in a contaminant trap

ASML NETHERLANDS BV50 citations91
US7251012B2Jul 31, 2007

Lithographic apparatus having a debris-mitigation system, a source for producing EUV radiation having a debris mitigation system and a method for mitigating debris

ASML NETHERLANDS BV25 citations91
US7315346B2Jan 1, 2008

Lithographic apparatus and device manufacturing method

ASML NETHERLANDS BV27 citations90
US7456932B2Nov 25, 2008

Filter window, lithographic projection apparatus, filter window manufacturing method, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV9 citations84
US7336416B2Feb 26, 2008

Spectral purity filter for multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method

ASML NETHERLANDS BV12 citations84
US7061574B2Jun 13, 2006

Lithographic apparatus with contamination suppression, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV11 citations84
US6906788B2Jun 14, 2005

Lithographic projection apparatus with multiple suppression meshes

ASML NETHERLANDS BV12 citations84
US7868304B2Jan 11, 2011

Method for removal of deposition on an optical element, lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV17 citations83
US7485881B2Feb 3, 2009

Lithographic apparatus, illumination system, filter system and method for cooling a support of such a filter system

ASML NETHERLANDS BV5 citations74
US7463413B2Dec 9, 2008

Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method

ASML NETHERLANDS BV8 citations74
US7405804B2Jul 29, 2008

Lithographic apparatus with enhanced spectral purity, device manufacturing method and device manufactured thereby

ASML NETHERLANDS BV7 citations74
US7211810B2May 1, 2007

Method for the protection of an optical element, lithographic apparatus, and device manufacturing method

ASML NETHERLANDS BV8 citations74
US7196343B2Mar 27, 2007

Optical element, lithographic apparatus including such an optical element, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV9 citations74
US7193229B2Mar 20, 2007

Lithographic apparatus, illumination system and method for mitigating debris particles

ASML NETHERLANDS BV8 citations74
US7034923B2Apr 25, 2006

Optical element, lithographic apparatus comprising such optical element and device manufacturing method

ASML NETHERLANDS BV8 citations74
US7737425B2Jun 15, 2010

Contamination barrier with expandable lamellas

ASML NETHERLANDS BV5 citations73
US7706057B2Apr 27, 2010

Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method

ASML NETHERLANDS BV5 citations73
US6930760B2Aug 16, 2005

Lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV10 citations73
US7897110B2Mar 1, 2011

System and method for detecting at least one contamination species in a lithographic apparatus

ASML NETHERLANDS BV5 citations72
US7592610B2Sep 22, 2009

Mirror for use in a lithographic apparatus, lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV5 citations63
US7414251B2Aug 19, 2008

Method for providing an operable filter system for filtering particles out of a beam of radiation, filter system, apparatus and lithographic apparatus comprising the filter system

ASML NETHERLANDS BV2 citations63
US7382436B2Jun 3, 2008

Mirror, lithographic apparatus, device manufacturing method, and device manufactured thereby

ASML NETHERLANDS BV5 citations63
US7256407B2Aug 14, 2007

Lithographic projection apparatus and reflector assembly for use therein

ASML NETHERLANDS BV2 citations63
US7233009B2Jun 19, 2007

Lithographic projection apparatus and reflector assembly for use therein

ASML NETHERLANDS BV4 citations63
US7105837B2Sep 12, 2006

Lithographic apparatus, device manufacturing method and radiation system

ASML NETHERLANDS BV4 citations63
US6791665B2Sep 14, 2004

Lithographic projection apparatus and device manufacturing method

ASML NETHERLANDS BV6 citations63

BAKKER LEVINUS PIETER

4 patents

KONINKL PHILIPS ELECTRONICS NV

3 patents

KONINK PHILIIPS ELECTRONICS N

1 patent

ZEISS CARL SMT AG

1 patent

VAN HERPEN MAARTEN MARINUS JOHANNES WILHELMUS

1 patent

KOEHLER THOMAS

1 patent

SHE JUN

1 patent

JONKERS JEROEN

1 patent

Showing the top 50 of 77 patents by PatentIndex Score.