Inventor
VAN HERPEN MAARTEN MARINUS JOHANNES
NL9 patents
⚠️ This page may combine multiple inventors who share the name “VAN HERPEN MAARTEN MARINUS JOHANNES”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
8 patentsUS7561247B2Jul 14, 2009
Method for the removal of deposition on an optical element, method for the protection of an optical element, device manufacturing method, apparatus including an optical element, and lithographic apparatus
ASML NETHERLANDS BV10 citations79
US7706057B2Apr 27, 2010
Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method
ASML NETHERLANDS BV5 citations73
US7541603B2Jun 2, 2009
Radiation system and lithographic apparatus comprising the same
ASML NETHERLANDS BV6 citations72
US7696493B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV5 citations61
US7696492B2Apr 13, 2010
Radiation system and lithographic apparatus
ASML NETHERLANDS BV6 citations61
US7687788B2Mar 30, 2010
Debris prevention system, radiation system, and lithographic apparatus
ASML NETHERLANDS BV2 citations60
US7692169B2Apr 6, 2010
Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
ASML NETHERLANDS BV0 citations51
US7724349B2May 25, 2010
Device arranged to measure a quantity relating to radiation and lithographic apparatus
ASML NETHERLANDS BV0 citations48