P

Inventor

VARIAN KATHRYN H

US5 patents
⚠️ This page may combine multiple inventors who share the name “VARIAN KATHRYN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

IBM

3 patents
US5916010AJun 29, 1999

CMP pad maintenance apparatus and method

IBM87 citations90
US6396160B1May 28, 2002

Fill strategies in the optical kerf

IBM12 citations68
US6797582B2Sep 28, 2004

Vertical thermal nitride mask (anti-collar) and processing thereof

IBM2 citations62

SIEMENS AG

2 patents
US5880007AMar 9, 1999

Planarization of a non-conformal device layer in semiconductor fabrication

SIEMENS AG59 citations94
US6001740ADec 14, 1999

Planarization of a non-conformal device layer in semiconductor fabrication

SIEMENS AG24 citations91