Inventor
MIYACHI TAKESHI
JP30 patents
⚠️ This page may combine multiple inventors who share the name “MIYACHI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CANON KK
23 patentsUS5854819ADec 29, 1998
Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same
CANON KK60 citations96
US5585923ADec 17, 1996
Method and apparatus for measuring positional deviation while correcting an error on the basis of the error detection by an error detecting means
CANON KK29 citations93
US6381005B1Apr 30, 2002
Mask holding device, exposure apparatus and device manufacturing method
CANON KK26 citations92
US6101237AAug 8, 2000
X-ray mask and X-ray exposure method using the same
CANON KK45 citations92
US6069931AMay 30, 2000
Mask structure and mask holding mechanism for exposure apparatus
CANON KK20 citations92
US5600698AFeb 4, 1997
X-ray exposure apparatus
CANON KK28 citations92
US5485495AJan 16, 1996
X-ray mask, and exposure apparatus and device production using the mask
CANON KK34 citations92
US5356686AOct 18, 1994
X-ray mask structure
CANON KK22 citations92
US4450457AMay 22, 1984
Liquid-jet recording head
CANON KK41 citations92
US6463119B1Oct 8, 2002
Exposure method, exposure apparatus and semiconductor manufacturing apparatus
CANON KK15 citations84
US7544960B2Jun 9, 2009
Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
CANON KK6 citations74
US6804323B2Oct 12, 2004
Mask pattern magnification correction method, magnification correction apparatus, and mask structure
CANON KK11 citations74
US6258492B1Jul 10, 2001
X-ray mask structure and method of making the same
CANON KK10 citations74
US4634227AJan 6, 1987
Optical modulating device having projection on substrate for registration
CANON KK14 citations73
US6985208B2Jan 10, 2006
Apparatus and method for retaining mirror, and mirror exchange method
CANON KK4 citations63
US6078640AJun 20, 2000
X-ray exposure apparatus
CANON KK6 citations63
US5994003ANov 30, 1999
Scanning exposure method and mask therefor
CANON KK3 citations63
US5861603AJan 19, 1999
Mask structure and method of making the same
CANON KK6 citations63
US5656398AAug 12, 1997
Method of making X-ray mask structure
CANON KK5 citations63
US5589304ADec 31, 1996
Photomask comprising a holding frame and reinforcing member with a ceramic oxide bond
CANON KK3 citations63
US7858958B2Dec 28, 2010
Evaluation method and fabrication method of optical element having multilayer film, exposure apparatus having the multilayer film, and device fabrication method
CANON KK0 citations52
US7510898B2Mar 31, 2009
Method of manufacturing image display device and method of dividing device
CANON KK0 citations52
US7170579B2Jan 30, 2007
Light source unit, exposure apparatus, and device manufacturing method
CANON KK0 citations51