Inventor
WU SHUN
US4 patents
Patents
4 patentsUS6565984B1May 20, 2003
Clean aluminum alloy for semiconductor processing equipment
APPLIED MATERIALS INC70 citations94
US6713188B2Mar 30, 2004
Clean aluminum alloy for semiconductor processing equipment
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US6199927B1Mar 13, 2001
Robot blade for handling of semiconductor substrates
APPLIED MATERIALS INC37 citations91
US6024393AFeb 15, 2000
Robot blade for handling of semiconductor substrate
APPLIED MATERIALS INC33 citations91