Inventor
LI XIANGBING
US6 patents
⚠️ This page may combine multiple inventors who share the name “LI XIANGBING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
4 patentsUS7053002B2May 30, 2006
Plasma preclean with argon, helium, and hydrogen gases
APPLIED MATERIALS INC19 citations92
US7014887B1Mar 21, 2006
Sequential sputter and reactive precleans of vias and contacts
APPLIED MATERIALS INC26 citations92
US6372301B1Apr 16, 2002
Method of improving adhesion of diffusion layers on fluorinated silicon dioxide
APPLIED MATERIALS INC25 citations92
US6277253B1Aug 21, 2001
External coating of tungsten or tantalum or other refractory metal on IMP coils
APPLIED MATERIALS INC21 citations91