Inventor
NOWAK KELLY A
US4 patents
Patents
4 patentsUS6156479ADec 5, 2000
Thermosetting anti-refective coatings
BREWER SCIENCE INC85 citations94
US6962769B2Nov 8, 2005
Anti-reflective coating composition with improved spin bowl compatibility
BREWER SCIENCE INC16 citations81
US6894104B2May 17, 2005
Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
BREWER SCIENCE INC12 citations79
USRE40920ESep 22, 2009
Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
BREWER SCIENCE INC0 citations47