Inventor
FOWLER MICHELLE
US3 patents
Patents
3 patentsUS6962769B2Nov 8, 2005
Anti-reflective coating composition with improved spin bowl compatibility
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Bottom anti-reflective coatings derived from small core molecules with multiple epoxy moieties
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US8865599B2Oct 21, 2014
Self-leveling planarization materials for microelectronic topography
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