Inventor
DESHPANDE SHREERAM V
US7 patents
Patents
7 patentsUS6846612B2Jan 25, 2005
Organic anti-reflective coating compositions for advanced microlithography
BREWER SCIENCE INC28 citations90
US7132216B2Nov 7, 2006
Non-aromatic chromophores for use in polymer anti-reflective coatings
BREWER SCIENCE INC12 citations83
US6962769B2Nov 8, 2005
Anti-reflective coating composition with improved spin bowl compatibility
BREWER SCIENCE INC16 citations81
US6894104B2May 17, 2005
Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
BREWER SCIENCE INC12 citations79
USRE41128EFeb 16, 2010
Organic anti-reflective coating compositions for advanced microlithography
BREWER SCIENCE INC1 citations49
USRE40920ESep 22, 2009
Anti-reflective coatings and dual damascene fill compositions comprising styrene-allyl alcohol copolymers
BREWER SCIENCE INC0 citations47
US6555287B1Apr 29, 2003
Non-subliming, difunctionalized ultraviolet dyes for use in anti-reflective coatings
BREWER SCIENCE INC0 citations39