Inventor
RATHI SUDHA S R
US3 patents
Patents
3 patentsUS7638440B2Dec 29, 2009
Method of depositing an amorphous carbon film for etch hardmask application
APPLIED MATERIALS INC27 citations90
US7407893B2Aug 5, 2008
Liquid precursors for the CVD deposition of amorphous carbon films
APPLIED MATERIALS INC33 citations90
US7094442B2Aug 22, 2006
Methods for the reduction and elimination of particulate contamination with CVD of amorphous carbon
APPLIED MATERIALS INC4 citations57