Inventor · disambiguated record
Kiyonobu Kubota
Also filed as: KUBOTA KIYONOBU
5 granted patents·1 pending application·104 citations·filing 1984–2019
80Inventor score
Top patents by PatentIndex Score
6 records- 0193US6527818B2Aqueous dispersion for chemical mechanical polishingJSR CORP·Filed 2001·Granted Mar 4, 2003·77 cites·16 claims
- 0288US7498294B2Cleaning composition, method for cleaning semiconductor substrate, and process for manufacturing semiconductor deviceJSR CORP·Filed 2005·Granted Mar 3, 2009·15 cites·16 claims
- 0366US6409780B1Water-laden solid matter of vapor-phase processed inorganic oxide particles and slurry for polishing and manufacturing method of semiconductor devicesTOSHIBA KK·Filed 2000·Granted Jun 25, 2002·4 cites·5 claims
- 0465US7378349B2Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing methodJSR CORP·Filed 2005·Granted May 27, 2008·2 cites·8 claims
- 0542US4547200ASlurry composition of solid fuelJAPAN SYNTHETIC RUBBER CO LTD·Filed 1984·Granted Oct 15, 1985·6 cites·9 claims
- 0641US2020208051A1Composition for semiconductor surface treatment and treatment method of semiconductor surfaceJSR CORP·Filed 2019·Application pending·0 cites
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