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Inventor

GEORGELIS ERIC

US11 patents
⚠️ This page may combine multiple inventors who share the name “GEORGELIS ERIC”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

APPLIED SCIENCE & TECH INC

7 patents
US6559408B2May 6, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC104 citations99
US6150628ANov 21, 2000

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC458 citations99
US6388226B1May 14, 2002

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC117 citations98
US6815633B1Nov 9, 2004

Inductively-coupled toroidal plasma source

APPLIED SCIENCE & TECH INC207 citations96
US6552296B2Apr 22, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC62 citations96
US6486431B1Nov 26, 2002

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC56 citations96
US6664497B2Dec 16, 2003

Toroidal low-field reactive gas source

APPLIED SCIENCE & TECH INC26 citations92

MKS INSTR INC

3 patents
US7161112B2Jan 9, 2007

Toroidal low-field reactive gas source

MKS INSTR INC45 citations96
US7166816B1Jan 23, 2007

Inductively-coupled torodial plasma source

MKS INSTR INC56 citations94
US7541558B2Jun 2, 2009

Inductively-coupled toroidal plasma source

MKS INSTR INC34 citations92

ALLIS CHALMERS

1 patent
US4204948AMay 27, 1980

Self-purging seal

ALLIS CHALMERS24 citations80