Inventor
MONE JR NICHOLAS
US7 patents
Patents
7 patentsUS6670624B1Dec 30, 2003
Ion implanter in-situ mass spectrometer
IBM39 citations88
US6559462B1May 6, 2003
Method to reduce downtime while implanting GeF4
IBM50 citations86
US7897939B2Mar 1, 2011
Removable liners for charged particle beam systems
IBM7 citations80
US7462845B2Dec 9, 2008
Removable liners for charged particle beam systems
IBM5 citations69
US7078710B2Jul 18, 2006
Ion beam system
IBM5 citations55
US7897940B2Mar 1, 2011
Removable liners for charged particle beam systems
IBM0 citations48
US9214318B1Dec 15, 2015
Electromagnetic electron reflector
IBM1 citations44