Inventor
LAMM ALBERT J
US7 patents
⚠️ This page may combine multiple inventors who share the name “LAMM ALBERT J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
5 patentsUS6035868AMar 14, 2000
Method and apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
LAM RES CORP21 citations92
US6033585AMar 7, 2000
Method and apparatus for preventing lightup of gas distribution holes
LAM RES CORP47 citations92
US6642063B2Nov 4, 2003
Apparatus for characterization of microelectronic feature quality
LAM RES CORP16 citations91
US6432729B1Aug 13, 2002
Method for characterization of microelectronic feature quality
LAM RES CORP28 citations91
US6155203ADec 5, 2000
Apparatus for control of deposit build-up on an inner surface of a plasma processing chamber
LAM RES CORP10 citations73