Inventor

SCHWARZFURTNER ALEXANDER

AT3 patents

⚠️ This page may combine multiple inventors who share the name “SCHWARZFURTNER ALEXANDER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BRUGGER MICHAEL

2 patents

US8231939B2Jul 31, 2012

Device and method for wet treating plate-like-articles

BRUGGER MICHAEL4 citations57

US8936832B2Jan 20, 2015

Device and method for wet treating plate-like-articles

BRUGGER MICHAEL1 citations47

FRANK DIETER

1 patent

US8801865B2Aug 12, 2014

Device and process for wet treating a peripheral area of a wafer-shaped article

FRANK DIETER4 citations65