Inventor
SCHMITTNER ARNO
DE8 patents
⚠️ This page may combine multiple inventors who share the name “SCHMITTNER ARNO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
5 patentsUS11099484B2Aug 24, 2021
Method for repairing reflective optical elements for EUV lithography
ZEISS CARL SMT GMBH0 citations59
US12547080B2Feb 10, 2026
Field facet system and lithography apparatus
ZEISS CARL SMT GMBH0 citations53
US12353137B2Jul 8, 2025
Field facet system and lithography apparatus
ZEISS CARL SMT GMBH0 citations53
US10578974B2Mar 3, 2020
Optical element, in particular for a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations48
US10303067B2May 28, 2019
Cooler for use in a device in a vacuum
ZEISS CARL SMT GMBH0 citations43