Inventor
HAMAMATSU AKIRA
JP84 patents
⚠️ This page may combine multiple inventors who share the name “HAMAMATSU AKIRA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
29 patentsUS7248352B2Jul 24, 2007
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP66 citations98
US7333192B2Feb 19, 2008
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP37 citations96
US7751036B2Jul 6, 2010
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP14 citations93
US7720275B2May 18, 2010
Method and apparatus for detecting pattern defects
HITACHI HIGH TECH CORP15 citations93
US7664608B2Feb 16, 2010
Defect inspection method and apparatus
HITACHI HIGH TECH CORP37 citations93
US7528942B2May 5, 2009
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP32 citations93
US7474394B2Jan 6, 2009
Apparatus of inspecting defect in semiconductor and method of the same
HITACHI HIGH TECH CORP27 citations93
US7315363B2Jan 1, 2008
Inspection method and inspection apparatus
HITACHI HIGH TECH CORP14 citations93
US7061602B2Jun 13, 2006
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI HIGH TECH CORP18 citations93
US7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US8660340B2Feb 25, 2014
Defect classification method and apparatus, and defect inspection apparatus
HITACHI HIGH TECH CORP10 citations84
US8013989B2Sep 6, 2011
Defects inspecting apparatus and defects inspecting method
HITACHI HIGH TECH CORP7 citations84
US7859656B2Dec 28, 2010
Defect inspection method and system
HITACHI HIGH TECH CORP15 citations84
US7768635B2Aug 3, 2010
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP10 citations84
US7492452B2Feb 17, 2009
Defect inspection method and system
HITACHI HIGH TECH CORP13 citations84
US7262425B2Aug 28, 2007
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP13 citations84
US7940385B2May 10, 2011
Defect inspection apparatus and its method
HITACHI HIGH TECH CORP5 citations74
US7912276B2Mar 22, 2011
Method and apparatus for detecting pattern defects
HITACHI HIGH TECH CORP5 citations74
US7903244B2Mar 8, 2011
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP3 citations74
US7586594B2Sep 8, 2009
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP4 citations74
US7256412B2Aug 14, 2007
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP5 citations74
US7115892B2Oct 3, 2006
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP7 citations74
US10254235B2Apr 9, 2019
Defect inspecting method and defect inspecting apparatus
HITACHI HIGH TECH CORP1 citations73
US9645094B2May 9, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9568439B2Feb 14, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP3 citations73
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US11143600B2Oct 12, 2021
Defect inspection device
HITACHI HIGH TECH CORP6 citations72
US8755041B2Jun 17, 2014
Defect inspection method and apparatus
HITACHI HIGH TECH CORP3 citations63
US8355123B2Jan 15, 2013
Defect inspection apparatus and its method
HITACHI HIGH TECH CORP2 citations63
HITACHI LTD
10 patentsUS6797975B2Sep 28, 2004
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD56 citations96
US7417723B2Aug 26, 2008
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI LTD10 citations93
US7417721B2Aug 26, 2008
Defect detector and defect detecting method
HITACHI LTD20 citations93
US7332359B2Feb 19, 2008
Semiconductor device inspection method
HITACHI LTD20 citations93
US6936835B2Aug 30, 2005
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD34 citations93
US7315366B2Jan 1, 2008
Apparatus and method for inspecting defects
HITACHI LTD17 citations92
US7187438B2Mar 6, 2007
Apparatus and method for inspecting defects
HITACHI LTD25 citations92
US6731384B2May 4, 2004
Apparatus for detecting foreign particle and defect and the same method
HITACHI LTD44 citations92
US7643138B2Jan 5, 2010
Method of inspecting a semiconductor device and an apparatus thereof
HITACHI LTD5 citations74
US7511806B2Mar 31, 2009
Apparatus and method for inspecting defects
HITACHI LTD7 citations74
HAMAMATSU AKIRA
3 patentsUS8144337B2Mar 27, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA15 citations92
US8310665B2Nov 13, 2012
Inspecting method and inspecting apparatus for substrate surface
HAMAMATSU AKIRA9 citations84
US8274651B2Sep 25, 2012
Method of inspecting a semiconductor device and an apparatus thereof
HAMAMATSU AKIRA3 citations74
NAKANO HIROYUKI
2 patentsHITACHI HIGH TECH ELECT ENG CO
1 patentSHIBUYA HISAE
1 patentMINOLTA CO LTD
1 patentNAKAO TOSHIYUKI
1 patentNEMOTO KAZUNORI
1 patentURANO YUTA
1 patentShowing the top 50 of 84 patents by PatentIndex Score.