Inventor

NOGUCHI MINORI

JP113 patents

⚠️ This page may combine multiple inventors who share the name “NOGUCHI MINORI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

NOGUCHI MINORI

HITACHI LTD

Optical apparatus for defect and particle size inspection

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line

Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same

Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process

Method and its apparatus for inspecting particles or defects of a semiconductor device

Apparatus and method for inspector defects

Foreign particle inspection apparatus

Method and apparatus for processing a minute portion of a specimen

Exposure apparatus and method

Method and apparatus for processing a minute portion of a specimen

Method and apparatus for detecting abnormal patterns

Apparatus for measuring the depth of fine engraved patterns

Method of detecting defects on an object

Illumination method, illumination apparatus and projection exposure apparatus

Method of inspecting reticles and apparatus therefor

Defect detector and defect detecting method

Method of inspecting a semiconductor device and an apparatus thereof

Semiconductor device inspection method

Method and its apparatus for inspecting particles or defects of a semiconductor device

Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data

Method for manufacturing semiconductor devices and method and its apparatus for processing detected defect data

Image classification method, observation method, and apparatus thereof with different stage moving velocities

Apparatus and method for inspecting defects

Method of and apparatus for detecting foreign substance

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for inspecting defects

Method and system for inspecting electronic circuit pattern

Apparatus and method for inspecting defects

Apparatus for detecting foreign particle and defect and the same method

Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system

Apparatus and method of inspecting foreign particle or defect on a sample

Exposure apparatus and method

Exposure apparatus and method

HITACHI HIGH TECH CORP

Method for inspecting defect and apparatus for inspecting defect

Apparatus and method for testing defects

Apparatus and method for testing defects

Inspection method and inspection apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Defect inspecting apparatus

Method of apparatus for detecting particles on a specimen

Surface inspection apparatus and method thereof

System for monitoring foreign particles, process processing apparatus and method of electronic commerce

HITACHI HIGH TECH ELECT ENG CO

Method of inspecting a semiconductor device and an apparatus thereof

Surface inspection apparatus and method thereof

Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device

UNIV COLUMBIA

Apparatus and methods for determining the three-dimensional shape of an object using active illumination and relative blurring in two-images due to defocus

RENESAS TECH CORP

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process