Inventor

OHSHIMA YOSHIMASA

JP53 patents

⚠️ This page may combine multiple inventors who share the name “OHSHIMA YOSHIMASA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

OHSHIMA YOSHIMASA

HITACHI LTD

Optical apparatus for defect and particle size inspection

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

Method and apparatus for inspecting foreign particles on real time basis in semiconductor mass production line

Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process

Method of and apparatus for detecting foreign substances

Method of detecting defects on an object

Defect detector and defect detecting method

Method of inspecting a semiconductor device and an apparatus thereof

Semiconductor device inspection method

Method and its apparatus for inspecting particles or defects of a semiconductor device

Method of and apparatus for inspecting surface defects

Method of and apparatus for detecting foreign substance

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus and method for testing defects

Apparatus for detecting foreign particle and defect and the same method

Semiconductor device producing method, system for carrying out the same and semiconductor work processing apparatus included in the same system

Apparatus and method of inspecting foreign particle or defect on a sample

Method of and apparatus for detecting foreign substances

Method of detecting pattern defect and its apparatus

Test apparatus for defects of plate

Method and apparatus for detecting defects

Method of inspecting a semiconductor device and an apparatus thereof

Detection of surface particles by dual semiconductor lasers having stable illumination intensities

Focusing position detecting device in optical magnifying and observing apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Method and its apparatus for inspecting particles or defects of a semiconductor device

HITACHI HIGH TECH CORP

Method for inspecting defect and apparatus for inspecting defect

Apparatus and method for testing defects

Apparatus and method for testing defects

Inspection method and inspection apparatus

Method of inspecting a semiconductor device and an apparatus thereof

Method of apparatus for detecting particles on a specimen

Defects inspecting apparatus and defects inspecting method

Method and apparatus for detecting defects

Method and its apparatus for inspecting particles or defects of a semiconductor device

Method for inspecting defect and apparatus for inspecting defect

Method for inspecting defect and apparatus for inspecting defect

Method of apparatus for detecting particles on a specimen

Defects inspecting apparatus and defects inspecting method

Method and apparatus for detecting defects on a wafer

Method of apparatus for detecting particles on a specimen

HAMAMATSU AKIRA

Method of inspecting a semiconductor device and an apparatus thereof

Inspection method and inspection apparatus

Method of apparatus for detecting particles on a specimen

Method of inspecting a semiconductor device and an apparatus thereof

RENESAS TECH CORP

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

Method and apparatus for analyzing the state of generation of foreign particles in semiconductor fabrication process

HITACHI HIGH TECH ELECT ENG CO

Method of inspecting a semiconductor device and an apparatus thereof

UTO SACHIO

Defects inspecting apparatus and defects inspecting method