Inventor
JINGU TAKAHIRO
JP66 patents
⚠️ This page may combine multiple inventors who share the name “JINGU TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI HIGH TECH CORP
28 patentsUS7248352B2Jul 24, 2007
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP66 citations98
US7098055B2Aug 29, 2006
Apparatus and method for testing defects
HITACHI HIGH TECH CORP36 citations96
US7037735B2May 2, 2006
Apparatus and method for testing defects
HITACHI HIGH TECH CORP43 citations96
US7315363B2Jan 1, 2008
Inspection method and inspection apparatus
HITACHI HIGH TECH CORP14 citations93
US7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US7777876B2Aug 17, 2010
Inspection method and inspection device
HITACHI HIGH TECH CORP27 citations90
US8013989B2Sep 6, 2011
Defects inspecting apparatus and defects inspecting method
HITACHI HIGH TECH CORP7 citations84
US7262425B2Aug 28, 2007
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP13 citations84
US7925390B2Apr 12, 2011
Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space
HITACHI HIGH TECH CORP14 citations83
US7903244B2Mar 8, 2011
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP3 citations74
US7586594B2Sep 8, 2009
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP4 citations74
US7256412B2Aug 14, 2007
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP5 citations74
US7115892B2Oct 3, 2006
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP7 citations74
US9645094B2May 9, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP2 citations73
US9568439B2Feb 14, 2017
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP3 citations73
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US7768634B2Aug 3, 2010
Defects inspecting apparatus and defects inspecting method
HITACHI HIGH TECH CORP3 citations63
US6998630B2Feb 14, 2006
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI HIGH TECH CORP2 citations63
US7952700B2May 31, 2011
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP2 citations62
US10818471B2Oct 27, 2020
Charged particle beam device
HITACHI HIGH TECH CORP0 citations52
US10444011B2Oct 15, 2019
Sample for coordinates calibration and method for fabricating the same
HITACHI HIGH TECH CORP0 citations52
US10261026B2Apr 16, 2019
Defect inspection method, low light detecting method, and low light detector
HITACHI HIGH TECH CORP0 citations52
US9823065B2Nov 21, 2017
Surface measurement apparatus
HITACHI HIGH TECH CORP1 citations52
US9791380B2Oct 17, 2017
Inspection device and image capture element
HITACHI HIGH TECH CORP0 citations52
US9759669B2Sep 12, 2017
Inspection device
HITACHI HIGH TECH CORP0 citations52
US9568437B2Feb 14, 2017
Inspection device
HITACHI HIGH TECH CORP1 citations52
US9329136B2May 3, 2016
Defect inspection device and defect inspection method
HITACHI HIGH TECH CORP0 citations52
US9019490B2Apr 28, 2015
Surface-defect inspection device
HITACHI HIGH TECH CORP0 citations52
HITACHI LTD
11 patentsUS6411377B1Jun 25, 2002
Optical apparatus for defect and particle size inspection
HITACHI LTD174 citations99
US6797975B2Sep 28, 2004
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD56 citations96
US7940383B2May 10, 2011
Method of detecting defects on an object
HITACHI LTD42 citations95
US6002989ADec 14, 1999
System for quality control where inspection frequency of inspection apparatus is reset to minimize expected total loss based on derived frequency function and loss value
HITACHI LTD84 citations94
US7417721B2Aug 26, 2008
Defect detector and defect detecting method
HITACHI LTD20 citations93
US6936835B2Aug 30, 2005
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD34 citations93
US7692779B2Apr 6, 2010
Apparatus and method for testing defects
HITACHI LTD12 citations92
US7639350B2Dec 29, 2009
Apparatus and method for testing defects
HITACHI LTD25 citations92
US7443496B2Oct 28, 2008
Apparatus and method for testing defects
HITACHI LTD16 citations92
US6597448B1Jul 22, 2003
Apparatus and method of inspecting foreign particle or defect on a sample
HITACHI LTD44 citations92
US7411207B2Aug 12, 2008
Method and its apparatus for inspecting particles or defects of a semiconductor device
HITACHI LTD4 citations63
TAKAHASHI KAZUO
2 patentsHAMAMATSU AKIRA
2 patentsNEMOTO KAZUNORI
1 patentHORAI IZUO
1 patentITO MASAAKI
1 patentURANO YUTA
1 patentSUZUKI KATSUYA
1 patentUTO SACHIO
1 patentJINGU TAKAHIRO
1 patentShowing the top 50 of 66 patents by PatentIndex Score.