P

Inventor

JINGU TAKAHIRO

JP66 patents
⚠️ This page may combine multiple inventors who share the name “JINGU TAKAHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

HITACHI HIGH TECH CORP

28 patents
US7248352B2Jul 24, 2007

Method for inspecting defect and apparatus for inspecting defect

HITACHI HIGH TECH CORP66 citations98
US7098055B2Aug 29, 2006

Apparatus and method for testing defects

HITACHI HIGH TECH CORP36 citations96
US7037735B2May 2, 2006

Apparatus and method for testing defects

HITACHI HIGH TECH CORP43 citations96
US7315363B2Jan 1, 2008

Inspection method and inspection apparatus

HITACHI HIGH TECH CORP14 citations93
US7369223B2May 6, 2008

Method of apparatus for detecting particles on a specimen

HITACHI HIGH TECH CORP25 citations92
US7777876B2Aug 17, 2010

Inspection method and inspection device

HITACHI HIGH TECH CORP27 citations90
US8013989B2Sep 6, 2011

Defects inspecting apparatus and defects inspecting method

HITACHI HIGH TECH CORP7 citations84
US7262425B2Aug 28, 2007

Method and its apparatus for inspecting particles or defects of a semiconductor device

HITACHI HIGH TECH CORP13 citations84
US7925390B2Apr 12, 2011

Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space

HITACHI HIGH TECH CORP14 citations83
US7903244B2Mar 8, 2011

Method for inspecting defect and apparatus for inspecting defect

HITACHI HIGH TECH CORP3 citations74
US7586594B2Sep 8, 2009

Method for inspecting defect and apparatus for inspecting defect

HITACHI HIGH TECH CORP4 citations74
US7256412B2Aug 14, 2007

Method and its apparatus for inspecting particles or defects of a semiconductor device

HITACHI HIGH TECH CORP5 citations74
US7115892B2Oct 3, 2006

Method and its apparatus for inspecting particles or defects of a semiconductor device

HITACHI HIGH TECH CORP7 citations74
US9645094B2May 9, 2017

Defect inspection device and defect inspection method

HITACHI HIGH TECH CORP2 citations73
US9568439B2Feb 14, 2017

Defect inspection device and defect inspection method

HITACHI HIGH TECH CORP3 citations73
US7817261B2Oct 19, 2010

Method of apparatus for detecting particles on a specimen

HITACHI HIGH TECH CORP4 citations73
US7768634B2Aug 3, 2010

Defects inspecting apparatus and defects inspecting method

HITACHI HIGH TECH CORP3 citations63
US6998630B2Feb 14, 2006

Method and its apparatus for inspecting particles or defects of a semiconductor device

HITACHI HIGH TECH CORP2 citations63
US7952700B2May 31, 2011

Method of apparatus for detecting particles on a specimen

HITACHI HIGH TECH CORP2 citations62
US10818471B2Oct 27, 2020

Charged particle beam device

HITACHI HIGH TECH CORP0 citations52
US10444011B2Oct 15, 2019

Sample for coordinates calibration and method for fabricating the same

HITACHI HIGH TECH CORP0 citations52
US10261026B2Apr 16, 2019

Defect inspection method, low light detecting method, and low light detector

HITACHI HIGH TECH CORP0 citations52
US9823065B2Nov 21, 2017

Surface measurement apparatus

HITACHI HIGH TECH CORP1 citations52
US9791380B2Oct 17, 2017

Inspection device and image capture element

HITACHI HIGH TECH CORP0 citations52
US9759669B2Sep 12, 2017

Inspection device

HITACHI HIGH TECH CORP0 citations52
US9568437B2Feb 14, 2017

Inspection device

HITACHI HIGH TECH CORP1 citations52
US9329136B2May 3, 2016

Defect inspection device and defect inspection method

HITACHI HIGH TECH CORP0 citations52
US9019490B2Apr 28, 2015

Surface-defect inspection device

HITACHI HIGH TECH CORP0 citations52

HITACHI LTD

11 patents

TAKAHASHI KAZUO

2 patents

HAMAMATSU AKIRA

2 patents

NEMOTO KAZUNORI

1 patent

HORAI IZUO

1 patent

ITO MASAAKI

1 patent

URANO YUTA

1 patent

SUZUKI KATSUYA

1 patent

UTO SACHIO

1 patent

JINGU TAKAHIRO

1 patent

Showing the top 50 of 66 patents by PatentIndex Score.