Inventor
UTO SACHIO
JP76 patents
⚠️ This page may combine multiple inventors who share the name “UTO SACHIO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
HITACHI LTD
25 patentsUS6621571B1Sep 16, 2003
Method and apparatus for inspecting defects in a patterned specimen
HITACHI LTD149 citations99
US6943086B2Sep 13, 2005
Laser annealing apparatus, TFT device and annealing method of the same
HITACHI LTD82 citations98
US6556290B2Apr 29, 2003
Defect inspection method and apparatus therefor
HITACHI LTD75 citations98
US6800859B1Oct 5, 2004
Method and equipment for detecting pattern defect
HITACHI LTD55 citations96
US4669875AJun 2, 1987
Foreign particle detecting method and apparatus
HITACHI LTD79 citations96
US7417721B2Aug 26, 2008
Defect detector and defect detecting method
HITACHI LTD20 citations93
US7218389B2May 15, 2007
Method and apparatus for inspecting pattern defects
HITACHI LTD24 citations93
US6576559B2Jun 10, 2003
Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses
HITACHI LTD32 citations93
US6355570B1Mar 12, 2002
Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses
HITACHI LTD22 citations93
US5135303AAug 4, 1992
Method of and apparatus for inspecting surface defects
HITACHI LTD39 citations93
US4922308AMay 1, 1990
Method of and apparatus for detecting foreign substance
HITACHI LTD43 citations93
US4676637AJun 30, 1987
Exposure apparatus with foreign particle detector
HITACHI LTD44 citations93
US7081953B2Jul 25, 2006
Apparatus and method for inspecting pattern
HITACHI LTD11 citations92
US6831737B2Dec 14, 2004
Apparatus and method for inspecting pattern
HITACHI LTD14 citations92
US7326623B2Feb 5, 2008
Method of manufacturing display device
HITACHI LTD11 citations84
US7251024B2Jul 31, 2007
Defect inspection method and apparatus therefor
HITACHI LTD10 citations84
US6943876B2Sep 13, 2005
Method and apparatus for detecting pattern defects
HITACHI LTD17 citations84
US6721047B2Apr 13, 2004
Method and apparatus for inspecting defects of a specimen
HITACHI LTD18 citations84
US7791725B2Sep 7, 2010
Method and equipment for detecting pattern defect
HITACHI LTD5 citations74
US7456963B2Nov 25, 2008
Method and equipment for detecting pattern defect
HITACHI LTD7 citations74
US6921905B2Jul 26, 2005
Method and equipment for detecting pattern defect
HITACHI LTD5 citations74
US6819416B2Nov 16, 2004
Defect inspection method and apparatus therefor
HITACHI LTD12 citations74
US6765201B2Jul 20, 2004
Ultraviolet laser-generating device and defect inspection apparatus and method therefor
HITACHI LTD10 citations74
US4701050AOct 20, 1987
Semiconductor exposure apparatus and alignment method therefor
HITACHI LTD12 citations74
US4725737AFeb 16, 1988
Alignment method and apparatus for reduction projection type aligner
HITACHI LTD17 citations73
HITACHI HIGH TECH CORP
20 patentsUS7248352B2Jul 24, 2007
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP66 citations98
US7465935B2Dec 16, 2008
Method for inspecting pattern defect and device for realizing the same
HITACHI HIGH TECH CORP45 citations96
US7333192B2Feb 19, 2008
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP37 citations96
US7528942B2May 5, 2009
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP32 citations93
US7315363B2Jan 1, 2008
Inspection method and inspection apparatus
HITACHI HIGH TECH CORP14 citations93
US7369223B2May 6, 2008
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP25 citations92
US8013989B2Sep 6, 2011
Defects inspecting apparatus and defects inspecting method
HITACHI HIGH TECH CORP7 citations84
US7859656B2Dec 28, 2010
Defect inspection method and system
HITACHI HIGH TECH CORP15 citations84
US7851753B2Dec 14, 2010
Method and apparatus for reviewing defects
HITACHI HIGH TECH CORP20 citations84
US7768635B2Aug 3, 2010
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP10 citations84
US7601954B2Oct 13, 2009
Method and apparatus for reviewing defects
HITACHI HIGH TECH CORP10 citations84
US7492452B2Feb 17, 2009
Defect inspection method and system
HITACHI HIGH TECH CORP13 citations84
US7903244B2Mar 8, 2011
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP3 citations74
US7586594B2Sep 8, 2009
Method for inspecting defect and apparatus for inspecting defect
HITACHI HIGH TECH CORP4 citations74
US9976966B2May 22, 2018
Defect inspection method and its device
HITACHI HIGH TECH CORP3 citations73
US9513228B2Dec 6, 2016
Defect inspection method and its device
HITACHI HIGH TECH CORP3 citations73
US7817261B2Oct 19, 2010
Method of apparatus for detecting particles on a specimen
HITACHI HIGH TECH CORP4 citations73
US7973920B2Jul 5, 2011
Apparatus and method for inspecting defects
HITACHI HIGH TECH CORP3 citations63
US7768634B2Aug 3, 2010
Defects inspecting apparatus and defects inspecting method
HITACHI HIGH TECH CORP3 citations63
US7751037B2Jul 6, 2010
Method and apparatus for detecting defects
HITACHI HIGH TECH CORP3 citations63
HITACHI DISPLAYS LTD
2 patentsNAKANO HIROYUKI
2 patentsHAMAMATSU AKIRA
1 patentShowing the top 50 of 76 patents by PatentIndex Score.