Inventor
MIYAZAKI SHINOBU
JP7 patents
⚠️ This page may combine multiple inventors who share the name “MIYAZAKI SHINOBU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS10974181B2Apr 13, 2021
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations58
US10493387B2Dec 3, 2019
Filter unit pretreatment method, treatment liquid supply apparatus, filter unit heating apparatus, and treatment liquid supply passage pretreatment method
TOKYO ELECTRON LTD0 citations48
US9229337B2Jan 5, 2016
Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium
TOKYO ELECTRON LTD0 citations40
US10000331B2Jun 19, 2018
Bottle change apparatus, substrate treatment apparatus, bottle change method, bottle cap, bottle cap change apparatus and bottle cap change method
TOKYO ELECTRON LTD0 citations33