Inventor
GOPALADASU PRABHAKARA
US6 patents
⚠️ This page may combine multiple inventors who share the name “GOPALADASU PRABHAKARA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS10361091B2Jul 23, 2019
Porous low-k dielectric etch
LAM RES CORP2 citations68
US10037890B2Jul 31, 2018
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP3 citations68
US10541141B2Jan 21, 2020
Method for selectively etching with reduced aspect ratio dependence
LAM RES CORP0 citations48
US10002773B2Jun 19, 2018
Method for selectively etching silicon oxide with respect to an organic mask
LAM RES CORP0 citations39