Inventor
KASHIMA KAZUHIKO
JP13 patents
⚠️ This page may combine multiple inventors who share the name “KASHIMA KAZUHIKO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOSHIBA CERAMICS CO
4 patentsUS5744401AApr 28, 1998
Silicon wafer manufacturing method eliminating final mirror-polishing step
TOSHIBA CERAMICS CO39 citations88
US4910156AMar 20, 1990
Neutron transmutation doping of a silicon wafer
TOSHIBA CERAMICS CO24 citations88
US7193294B2Mar 20, 2007
Semiconductor substrate comprising a support substrate which comprises a gettering site
TOSHIBA CERAMICS CO6 citations62
US7048796B2May 23, 2006
Silicon single crystal wafer fabricating method and silicon single crystal wafer
TOSHIBA CERAMICS CO5 citations59