Inventor
HUANG YUNWEN
CN11 patents
⚠️ This page may combine multiple inventors who share the name “HUANG YUNWEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA
4 patentsUS11670515B2Jun 6, 2023
Capacitively coupled plasma etching apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations51
US11515168B2Nov 29, 2022
Capacitively coupled plasma etching apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations51
US11373843B2Jun 28, 2022
Capacitively coupled plasma etching apparatus
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations51
US12573595B2Mar 10, 2026
Plasma processing apparatus and method of adjusting the same
ADVANCED MICRO FABRICATION EQUIPMENT INC CHINA0 citations47
ACM RESEARCH SHANGHAI INC
3 patentsUS8671961B2Mar 18, 2014
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC1 citations51
US9633833B2Apr 25, 2017
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC1 citations50
US10020208B2Jul 10, 2018
Methods and apparatus for cleaning semiconductor wafers
ACM RESEARCH SHANGHAI INC0 citations49