Inventor
LAI SU-CHEN
TW13 patents
⚠️ This page may combine multiple inventors who share the name “LAI SU-CHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
5 patentsUS7923321B2Apr 12, 2011
Method for gap filling in a gate last process
TAIWAN SEMICONDUCTOR MFG64 citations97
US7977181B2Jul 12, 2011
Method for gate height control in a gate last process
TAIWAN SEMICONDUCTOR MFG35 citations92
US8349680B2Jan 8, 2013
High-k metal gate CMOS patterning method
TAIWAN SEMICONDUCTOR MFG9 citations84
US7985690B2Jul 26, 2011
Method for a gate last process
TAIWAN SEMICONDUCTOR MFG16 citations83
US7981801B2Jul 19, 2011
Chemical mechanical polishing (CMP) method for gate last process
TAIWAN SEMICONDUCTOR MFG13 citations83
PROMOS TECHNOLOGIES INC
4 patentsUS6881620B1Apr 19, 2005
Method of fabricating deep trench capacitor
PROMOS TECHNOLOGIES INC9 citations71
US7808019B2Oct 5, 2010
Gate structure
PROMOS TECHNOLOGIES INC4 citations62
US7459383B2Dec 2, 2008
Fabricating method of gate structure
PROMOS TECHNOLOGIES INC2 citations62
US7026210B2Apr 11, 2006
Method for forming a bottle-shaped trench
PROMOS TECHNOLOGIES INC1 citations51
LAI SU-CHEN
3 patentsUS8530326B2Sep 10, 2013
Method of fabricating a dummy gate structure in a gate last process
LAI SU-CHEN6 citations82
US8237227B2Aug 7, 2012
Dummy gate structure for gate last process
LAI SU-CHEN10 citations80
US9054025B2Jun 9, 2015
Process for controlling shallow trench isolation step height
LAI SU-CHEN0 citations39