Inventor
SHEN GARY
TW9 patents
⚠️ This page may combine multiple inventors who share the name “SHEN GARY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS7923321B2Apr 12, 2011
Method for gap filling in a gate last process
TAIWAN SEMICONDUCTOR MFG64 citations97
US8349680B2Jan 8, 2013
High-k metal gate CMOS patterning method
TAIWAN SEMICONDUCTOR MFG9 citations84
US7985690B2Jul 26, 2011
Method for a gate last process
TAIWAN SEMICONDUCTOR MFG16 citations83
US7981801B2Jul 19, 2011
Chemical mechanical polishing (CMP) method for gate last process
TAIWAN SEMICONDUCTOR MFG13 citations83