P

Inventor

YAMAGUCHI SHIN

JP38 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

20 patents
US10825660B2Nov 3, 2020

Electrostatic chuck and plasma processing apparatus

TOKYO ELECTRON LTD5 citations82
US10340174B2Jul 2, 2019

Mounting table and plasma processing apparatus

TOKYO ELECTRON LTD7 citations82
US11908666B2Feb 20, 2024

Stage and plasma processing apparatus

TOKYO ELECTRON LTD3 citations73
US11935729B2Mar 19, 2024

Substrate support and plasma processing apparatus

TOKYO ELECTRON LTD2 citations72
US10796889B2Oct 6, 2020

Processing apparatus for target object and inspection method for processing apparatus

TOKYO ELECTRON LTD3 citations72
US11437223B2Sep 6, 2022

Stage and plasma processing apparatus

TOKYO ELECTRON LTD1 citations71
US12293903B2May 6, 2025

Substrate support and plasma processing apparatus

TOKYO ELECTRON LTD0 citations61
US12272528B2Apr 8, 2025

Stage and plasma processing apparatus

TOKYO ELECTRON LTD0 citations61
US11476095B2Oct 18, 2022

Electrostatic chuck and plasma processing apparatus

TOKYO ELECTRON LTD0 citations61
US10818480B2Oct 27, 2020

Method of operating electrostatic chuck of plasma processing apparatus

TOKYO ELECTRON LTD1 citations61
US10665432B2May 26, 2020

Temperature control method

TOKYO ELECTRON LTD1 citations61
US11404251B2Aug 2, 2022

Processing apparatus for processing target object

TOKYO ELECTRON LTD1 citations60
US12444635B2Oct 14, 2025

Substrate support and substrate processing apparatus

TOKYO ELECTRON LTD0 citations59
US11791139B2Oct 17, 2023

Substrate support

TOKYO ELECTRON LTD0 citations58
US12165896B2Dec 10, 2024

Substrate support and substrate processing apparatus

TOKYO ELECTRON LTD0 citations50
US12068143B2Aug 20, 2024

Temperature adjustment method

TOKYO ELECTRON LTD0 citations50
US11869799B2Jan 9, 2024

Temperature adjustment system

TOKYO ELECTRON LTD0 citations50
US11236420B2Feb 1, 2022

Cleaning method

TOKYO ELECTRON LTD0 citations50
US11060770B2Jul 13, 2021

Cooling system

TOKYO ELECTRON LTD0 citations50
US12217943B2Feb 4, 2025

Substrate processing apparatus and electrostatic chuck

TOKYO ELECTRON LTD0 citations48

CANON KK

6 patents

SONY CORP

5 patents

G C DENTAL IND CORP

3 patents

RICOH KK

1 patent

OHASHI YOSHIO

1 patent

CANON INFORMATION SYST INC

1 patent

SONY GROUP CORP

1 patent