Inventor
YAMAGUCHI SHIN
JP38 patents
⚠️ This page may combine multiple inventors who share the name “YAMAGUCHI SHIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
20 patentsUS10825660B2Nov 3, 2020
Electrostatic chuck and plasma processing apparatus
TOKYO ELECTRON LTD5 citations82
US10340174B2Jul 2, 2019
Mounting table and plasma processing apparatus
TOKYO ELECTRON LTD7 citations82
US11908666B2Feb 20, 2024
Stage and plasma processing apparatus
TOKYO ELECTRON LTD3 citations73
US11935729B2Mar 19, 2024
Substrate support and plasma processing apparatus
TOKYO ELECTRON LTD2 citations72
US10796889B2Oct 6, 2020
Processing apparatus for target object and inspection method for processing apparatus
TOKYO ELECTRON LTD3 citations72
US11437223B2Sep 6, 2022
Stage and plasma processing apparatus
TOKYO ELECTRON LTD1 citations71
US12293903B2May 6, 2025
Substrate support and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US12272528B2Apr 8, 2025
Stage and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US11476095B2Oct 18, 2022
Electrostatic chuck and plasma processing apparatus
TOKYO ELECTRON LTD0 citations61
US10818480B2Oct 27, 2020
Method of operating electrostatic chuck of plasma processing apparatus
TOKYO ELECTRON LTD1 citations61
US10665432B2May 26, 2020
Temperature control method
TOKYO ELECTRON LTD1 citations61
US11404251B2Aug 2, 2022
Processing apparatus for processing target object
TOKYO ELECTRON LTD1 citations60
US12444635B2Oct 14, 2025
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations59
US11791139B2Oct 17, 2023
Substrate support
TOKYO ELECTRON LTD0 citations58
US12165896B2Dec 10, 2024
Substrate support and substrate processing apparatus
TOKYO ELECTRON LTD0 citations50
US12068143B2Aug 20, 2024
Temperature adjustment method
TOKYO ELECTRON LTD0 citations50
US11869799B2Jan 9, 2024
Temperature adjustment system
TOKYO ELECTRON LTD0 citations50
US11236420B2Feb 1, 2022
Cleaning method
TOKYO ELECTRON LTD0 citations50
US11060770B2Jul 13, 2021
Cooling system
TOKYO ELECTRON LTD0 citations50
US12217943B2Feb 4, 2025
Substrate processing apparatus and electrostatic chuck
TOKYO ELECTRON LTD0 citations48
CANON KK
6 patentsUS6639693B1Oct 28, 2003
Data communication apparatus and method therefor
CANON KK119 citations98
US4439017AMar 27, 1984
Zoom lens
CANON KK29 citations92
US4547663AOct 15, 1985
Focus detecting apparatus with a compensation mask
CANON KK19 citations82
US4310221AJan 12, 1982
Variable soft-focus lens
CANON KK10 citations74
US4329022AMay 11, 1982
Two group type zoom lens with wide image angle
CANON KK2 citations63
US5563807AOct 8, 1996
Information processing system and method for lens arrangement
CANON KK4 citations52
SONY CORP
5 patentsG C DENTAL IND CORP
3 patentsUSD617455SJun 8, 2010
Angulus oris dilating implement
G C DENTAL IND CORP21 citations91
US7250155B2Jul 31, 2007
Dental bleaching agent kit and the method for bleaching teeth
G C DENTAL IND CORP14 citations83
US7326055B2Feb 5, 2008
Method for bleaching teeth and bleaching agent for teeth
G C DENTAL IND CORP2 citations61