Inventor
BATTLE SCOTT L
US25 patents
⚠️ This page may combine multiple inventors who share the name “BATTLE SCOTT L”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ENTEGRIS INC
16 patentsUS10465286B2Nov 5, 2019
Method and apparatus to help promote contact of gas with vaporized material
ENTEGRIS INC10 citations92
US9469898B2Oct 18, 2016
Method and apparatus to help promote contact of gas with vaporized material
ENTEGRIS INC10 citations92
US10392700B2Aug 27, 2019
Solid vaporizer
ENTEGRIS INC14 citations85
US10385452B2Aug 20, 2019
Source reagent-based delivery of fluid with high material flux for batch deposition
ENTEGRIS INC11 citations80
US9997362B2Jun 12, 2018
Cobalt CVD
ENTEGRIS INC4 citations73
US10526697B2Jan 7, 2020
High-purity tungsten hexacarbonyl for solid source delivery
ENTEGRIS INC4 citations72
US11761086B2Sep 19, 2023
Cobalt precursors
ENTEGRIS INC0 citations62
US10895347B2Jan 19, 2021
Heat transfer to ampoule trays
ENTEGRIS INC1 citations62
US11746413B2Sep 5, 2023
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60
US11421320B2Aug 23, 2022
Chemical delivery system and method of operating the chemical delivery system
ENTEGRIS INC0 citations60
US12480209B2Nov 25, 2025
Vaporization vessel and method
ENTEGRIS INC0 citations54
US11821087B2Nov 21, 2023
Vaporization vessel and method
ENTEGRIS INC0 citations54
US12492471B2Dec 9, 2025
Precursor delivery systems for determining material levels
ENTEGRIS INC0 citations53
US12584217B2Mar 24, 2026
Tray assemblies for precursor delivery systems and related methods
ENTEGRIS INC0 citations52
US12334364B2Jun 17, 2025
Systems and methods for controlling precursor delivery
ENTEGRIS INC0 citations52
US9637395B2May 2, 2017
Fluorine free tungsten ALD/CVD process
ENTEGRIS INC1 citations52
ADVANCED TECH MATERIALS
6 patentsUS7300038B2Nov 27, 2007
Method and apparatus to help promote contact of gas with vaporized material
ADVANCED TECH MATERIALS67 citations97
US7828274B2Nov 9, 2010
Method and apparatus to help promote contact of gas with vaporized material
ADVANCED TECH MATERIALS19 citations92
US7556244B2Jul 7, 2009
Method and apparatus to help promote contact of gas with vaporized material
ADVANCED TECH MATERIALS28 citations92
US7487956B2Feb 10, 2009
Method and apparatus to help promote contact of gas with vaporized material
ADVANCED TECH MATERIALS27 citations92
US9004462B2Apr 14, 2015
Method and apparatus to help promote contact of gas with vaporized material
ADVANCED TECH MATERIALS9 citations84
US6458984B1Oct 1, 2002
Chemical method for removal and analysis of boron impurities in tetraethylorthosilicate (TEOS)
ADVANCED TECH MATERIALS13 citations69