Inventor
YILMAZ ALPAY
US14 patents
⚠️ This page may combine multiple inventors who share the name “YILMAZ ALPAY”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
10 patentsUS7044832B2May 16, 2006
Load cup for chemical mechanical polishing
APPLIED MATERIALS INC61 citations94
US7210981B2May 1, 2007
Smart conditioner rinse station
APPLIED MATERIALS INC18 citations92
US7611400B2Nov 3, 2009
Smart conditioner rinse station
APPLIED MATERIALS INC7 citations73
US10071887B2Sep 11, 2018
Universal component lift apparatus, assemblies, and methods for electronic device manufacturing
APPLIED MATERIALS INC2 citations72
US7914363B2Mar 29, 2011
Smart conditioner rinse station
APPLIED MATERIALS INC3 citations62
US12476120B2Nov 18, 2025
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations56
US11935771B2Mar 19, 2024
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations56
US7314808B2Jan 1, 2008
Method for sequencing substrates
APPLIED MATERIALS INC5 citations54
US7504018B2Mar 17, 2009
Electrochemical method for Ecmp polishing pad conditioning
APPLIED MATERIALS INC1 citations51
US11935770B2Mar 19, 2024
Modular mainframe layout for supporting multiple semiconductor process modules or chambers
APPLIED MATERIALS INC0 citations47