Inventor
CHANG TSUAN-CHUNG
US4 patents
Patents
4 patentsUS12507464B2Dec 23, 2025
Gate aligned fin cut for advanced integrated circuit structure fabrication
INTEL CORP0 citations60
US12464815B2Nov 4, 2025
Fin cut in neighboring gate and source or drain regions for advanced integrated circuit structure fabrication
INTEL CORP0 citations59
US12490462B2Dec 2, 2025
Angled gate or diffusion plugs
INTEL CORP0 citations54
US12405526B2Sep 2, 2025
Extreme ultraviolet lithography patterning with assist features
INTEL CORP0 citations39