Inventor
SHAW R HOWARD
8 patents
⚠️ This page may combine multiple inventors who share the name “SHAW R HOWARD”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN ASSOCIATES
7 patentsUS4311427AJan 19, 1982
Wafer transfer system
VARIAN ASSOCIATES165 citations98
US5281320AJan 25, 1994
Wafer coating system
VARIAN ASSOCIATES46 citations95
US4756815AJul 12, 1988
Wafer coating system
VARIAN ASSOCIATES46 citations92
US4647266AMar 3, 1987
Wafer coating system
VARIAN ASSOCIATES29 citations92
US4548699AOct 22, 1985
Transfer plate rotation system
VARIAN ASSOCIATES53 citations91
US4306731ADec 22, 1981
Wafer support assembly
VARIAN ASSOCIATES40 citations91
US4779877AOct 25, 1988
Wafer support assembly
VARIAN ASSOCIATES21 citations81